Manila Journal of Science 10 (2017), pp. 114-125

Surface Analysis of Silicon (100) Wafer After Contact Electrification Using Kelvin Force Microscopy


Contact electrification was demonstrated on Si (100) wafer, and surface charge images at submicron scale were analysed using Kelvin force microscopy (KFM). Potential map images have shown carpet-like patterns on the (100) plane of Si wafer. Individual potential spikes that appeared on the surface are indicative of the presence of charges arising from contact electrification. Read More